{"id":2834,"date":"2022-08-24T17:12:12","date_gmt":"2022-08-24T08:12:12","guid":{"rendered":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/?page_id=2834"},"modified":"2024-08-15T10:57:45","modified_gmt":"2024-08-15T01:57:45","slug":"equipment-2","status":"publish","type":"page","link":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/equipment-2.html","title":{"rendered":"\u88c5\u7f6e\u306b\u3064\u3044\u3066"},"content":{"rendered":"\r\n

XPS(\u5149\u96fb\u5b50\u5206\u5149\u88c5\u7f6e\u3000JPS-9200)<\/h2>\r\n\r\n\r\n\r\n

X\u7dda\u5149\u96fb\u5b50\u5206\u5149\u88c5\u7f6e(XPS)\u7c21\u6613\u30de\u30cb\u30e5\u30a2\u30eb\u6e2c\u5b9a\u7de820240726<\/a><\/p>\r\n\r\n\r\n\r\n

English X\u7dda\u5149\u96fb\u5b50\u5206\u5149\u88c5\u7f6e(XPS)\u7c21\u6613\u30de\u30cb\u30e5\u30a2\u30eb\u6e2c\u5b9a\u7de820240726<\/a><\/p>\r\n\r\n\r\n\r\n

X\u7dda\u5149\u96fb\u5b50\u5206\u5149\u88c5\u7f6e(XPS)\u7c21\u6613\u30de\u30cb\u30e5\u30a2\u30eb\u89e3\u6790\u7de820220922<\/a>\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9<\/a><\/div>\r\n\r\n\r\n\r\n
\"\"<\/figure>\r\n\r\n\r\n\r\n

XPS(\u5149\u96fb\u5b50\u5206\u5149\u88c5\u7f6e)<\/strong>\u3067\u306f\u3001\u8a66\u6599\u6700\u8868\u9762(~6nm)<\/strong>\u306e\u30013mm\u03a6\uff5e0.03mm\u03c6\u306e\u9818\u57df<\/strong>\u306b\u3064\u3044\u3066\u306e\u5143\u7d20\u5206\u6790<\/strong>\u3001\u5316\u5b66\u72b6\u614b\u5206\u6790<\/strong>\u3092\u884c\u3046\u4e8b\u304c\u51fa\u6765\u307e\u3059\u3002\u8a66\u6599\u306bX\u7dda\u3092\u7167\u5c04\u3057\u3066\u3001\u5149\u96fb\u52b9\u679c\u306b\u3088\u308a\u8a66\u6599\u8868\u9762\u304b\u3089\u653e\u51fa\u3055\u308c\u308b\u5149\u96fb\u5b50<\/strong>\u3092\u5206\u5149\u30fb\u691c\u51fa\u3057\u307e\u3059\u3002\u3053\u306e\u5149\u96fb\u5b50\u306e\u904b\u52d5\u30a8\u30cd\u30eb\u30ae\u30fc\u306f\u5404\u5143\u7d20\u30fb\u5316\u5b66\u72b6\u614b\u3067\u306e\u5185\u6bbb\u96fb\u5b50\u72b6\u614b(\u7d50\u5408\u30a8\u30cd\u30eb\u30ae\u30fc)\u306b\u4f9d\u5b58\u3057\u3066\u3044\u308b\u70ba\u3001\u5f97\u3089\u308c\u308b\u5149\u96fb\u5b50\u30b9\u30da\u30af\u30c8\u30eb\u304b\u3089\u5143\u7d20\u30fb\u5316\u5b66\u72b6\u614b\u306e\u540c\u5b9a\u30fb\u5b9a\u91cf<\/strong>\u3092\u884c\u3048\u307e\u3059\u3002<\/p>\r\n\r\n\r\n\r\n

\u6e2c\u5b9a\u51fa\u6765\u308b\u5143\u7d20\u306fLi\u4ee5\u4e0a\u306e\u5168\u5143\u7d20<\/strong>\u3067\u3001Li\u304c\u6e2c\u5b9a\u53ef\u80fd\u3067\u3042\u308b\u70b9\u304c\u7279\u5fb4\u3067\u3059\u3002\u30aa\u30fc\u30b8\u30a7\u96fb\u5b50\u5206\u5149\u88c5\u7f6e\u3068\u6bd4\u8f03\u3059\u308b\u3068\u6709\u6a5f\u7269\u306e\u5206\u6790<\/strong>\u3092\u5f97\u610f\u3068\u3057\u307e\u3059\u3002\u691c\u51fa\u4e0b\u9650\u306f0.1~1atm%<\/strong>\u307b\u3069\u3067\u3059\u3002 \u6e2c\u5b9a\u8a66\u6599<\/strong>\u306f\u30db\u30eb\u30c0\u30fc\u3078\u306e\u642d\u8f09\u30b5\u30a4\u30ba(\u6700\u592790\uff4d\uff4d\u03c6\u3001\u539a\u307f1.5\uff4d\uff4d\u4ee5\u5185<\/strong>)\u306b\u53ce\u307e\u3063\u3066\u3044\u308b\u56fa\u5f62\u7269\u3067\u3042\u308c\u3070\u3001\u7d1b\u4f53\u3067\u3042\u3063\u3066\u3082\u554f\u984c\u3042\u308a\u307e\u305b\u3093\u3002\u307e\u305f\u3001\u534a\u5c0e\u4f53\u3084\u7d76\u7e01\u7269<\/strong>\u3067\u3042\u3063\u3066\u3082\u3001\u30c1\u30e3\u30fc\u30b8\u30a2\u30c3\u30d7\u73fe\u8c61\u3092\u7de9\u548c\u3055\u305b\u305f\u6e2c\u5b9a\u3082\u884c\u3048\u307e\u3059\u3002\u6700\u592720\u70b9<\/strong>\u307e\u3067\u5206\u6790\u4f4d\u7f6e\u3092\u6307\u5b9a\u3057\u3066\u9023\u7d9a\u6e2c\u5b9a\u3092\u884c\u3048\u307e\u3059\u3002 \u7167\u5c04\u3059\u308b\u6a19\u6e96X\u7dda<\/strong>\u306fMg-K\u03b1\u7dda<\/strong>\u3001Al-K\u03b1\u7dda<\/strong>\u306e\u4e8c\u3064\u304c\u3042\u308a\u307e\u3059\u3002\u4ed6\u306b\u30e2\u30ce\u30af\u30ed\u5316Al-K\u03b1\u7dda<\/strong>\u3092\u5229\u7528\u51fa\u6765\u307e\u3059\u3002\u30a8\u30cd\u30eb\u30ae\u30fc\u5206\u89e3\u80fd<\/strong>\u306f\u6700\u5927\u30670.65eV<\/strong>(\u30e2\u30ce\u30af\u30edAl-K\u03b1\u5229\u7528\u6642)\u3067\u3059\u3002 \u5f53\u88c5\u7f6e\u306fAr+\u30a4\u30aa\u30f3\u30ac\u30f3<\/strong>\u3092\u642d\u8f09\u3057\u3066\u304a\u308a\u3001\u8a66\u6599\u306bAr+\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u3092\u7167\u5c04\u3057\u3066\u8868\u9762\u306e\u30a8\u30c3\u30c1\u30f3\u30b0<\/strong>\u3092\u884c\u3048\u307e\u3059\u3002\u8868\u9762\u306e\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u306e\u9664\u53bb<\/strong>\u3084\u3001Ar+\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u6e2c\u5b9a\u3092\u7e70\u308a\u8fd4\u3059\u4e8b\u3067\u6df1\u3055\u65b9\u5411\u306e\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb<\/strong>\u3092\u5f97\u308b\u4e8b\u304c\u53ef\u80fd\u3067\u3059\u3002 \u6e2c\u5b9a\u6cd5\u3068\u3057\u3066\u306f\u5e83\u7bc4\u56f2\u306e\u5149\u96fb\u5b50\u30b9\u30da\u30af\u30c8\u30eb\u3092\u53d6\u5f97\u3059\u308bWide scan<\/strong>\u3001\u5206\u89e3\u80fd\u3092\u4e0a\u3052\u3066\u5404\u5143\u7d20\u30d4\u30fc\u30af\u306e\u7cbe\u5bc6\u306a\u30b9\u30da\u30af\u30c8\u30eb\u3092\u53d6\u5f97\u3059\u308bNarrow scan<\/strong>\u306e\u4ed6\u3001Depth profile<\/strong>(Ar+\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u5229\u7528\u3057\u305f\u6df1\u3055\u65b9\u5411\u5206\u6790)\u3001Angle resolved<\/strong>(\u8a66\u6599\u3092\u50be\u659c\u3057\u3066\u6df1\u3055\u65b9\u5411\u306e\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u3092\u53d6\u5f97)\u3001Total reflection<\/strong>(X\u7dda\u3092\u5168\u53cd\u5c04\u3055\u305b\u308b\u6761\u4ef6\u3067\u8a66\u6599\u306e\u6700\u8868\u9762\u3092\u5206\u6790)\u3001Image<\/strong>(\u5143\u7d20\u30de\u30c3\u30d4\u30f3\u30b0\u3001\u7dda\u5206\u6790)\u304c\u3042\u308a\u307e\u3059\u3002\u5927\u6c17\u975e\u66dd\u9732\u5c0e\u5165\u7528\u306e\u30c8\u30e9\u30f3\u30b9\u30d5\u30a1\u30fc\u30d9\u30c3\u30bb\u30eb\u304c\u88c5\u5099\u3055\u308c\u3066\u304a\u308a\u3001\u8a66\u6599\u306e\u5927\u6c17\u975e\u66dd\u9732\u5c0e\u5165\u304c\u53ef\u80fd\u3067\u3059\u3002<\/p>\r\n\r\n\r\n\r\n

\u4ed6\u306b\u306f\u4e2d\u548c\u96fb\u5b50\u9283\u30fb\u96fb\u5727\u5370\u52a0\u7528\u30db\u30eb\u30c0\u30fc<\/strong>\u3092\u7528\u3044\u305f\u7d76\u7e01\u7269\u6e2c\u5b9a<\/strong>\u3082\u53ef\u80fd\u3067\u3059\u3002 \u5c02\u7528\u306e\u89e3\u6790\u30bd\u30d5\u30c8\u3067\u306f\u69d8\u3005\u306a\u30b9\u30da\u30af\u30c8\u30eb\u306e\u7de8\u96c6\u30fb\u89e3\u6790\u304c\u53ef\u80fd\u3067\u3059\u3002\u30b9\u30e0\u30fc\u30b8\u30f3\u30b0\u5316\u3001\u30c1\u30e3\u30fc\u30b8\u30a2\u30c3\u30d7\u88dc\u6b63\u3001\u30d0\u30c3\u30af\u30b0\u30e9\u30a6\u30f3\u30c9\u9664\u53bb\u3001\u30d4\u30fc\u30af\u30d5\u30a3\u30c3\u30c6\u30a3\u30f3\u30b0\u3001\u76f8\u5bfe\u7684\u5b9a\u91cf\u8a08\u7b97\u3001\u819c\u539a\u8a08\u7b97<\/strong>\u306a\u3069\u3002\u5f53\u7814\u7a76\u5ba4\u3067\u306fXPS\u89e3\u6790\u30bd\u30d5\u30c8\u304c\u30a4\u30f3\u30b9\u30c8\u30fc\u30eb\u3055\u308c\u305fPC\u3092\u958b\u653e\u3057\u3066\u304a\u308a\u3001\u30e6\u30fc\u30b6\u30fc\u306e\u65b9\u306f\u3054\u81ea\u7531\u306b\u3054\u5229\u7528\u9802\u3051\u307e\u3059\u3002<\/p>\r\n\r\n\r\n\r\n

\"\"\r\n
\u30c8\u30e9\u30f3\u30b9\u30d5\u30a1\u30fc\u30d9\u30c3\u30bb\u30eb<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n
\"\"\r\n
\u30ef\u30a4\u30c9\u30b9\u30ad\u30e3\u30f3<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n
\"\"\r\n
\u6ce2\u5f62\u5206\u96e2<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n
\"\"\r\n
\u30c7\u30d7\u30b9\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n

AES(\u30aa\u30fc\u30b8\u30a7\u96fb\u5b50\u5206\u5149\u88c5\u7f6e\u3000JAMP-9500F\u3000EBSD(OIM ORION\u691c\u51fa\u5668)\u4ed8\u304d\u3001spectrum image\u6a5f\u80fd\u3042\u308a)<\/h2>\r\n\r\n\r\n\r\n
\u30aa\u30fc\u30b8\u30a7\u30de\u30a4\u30af\u30ed\u30d7\u30ed\u30fc\u30d6(AES)\u7c21\u6613\u30de\u30cb\u30e5\u30a2\u30eb\u6e2c\u5b9a\u7de820230904<\/a>\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9<\/a><\/div>\r\n\r\n\r\n\r\n

\u30aa\u30fc\u30b8\u30a7\u30de\u30a4\u30af\u30ed\u30d7\u30ed\u30fc\u30d6(AES)\u7c21\u6613\u30de\u30cb\u30e5\u30a2\u30eb\u89e3\u6790\u7de820220420<\/a><\/p>\r\n\r\n\r\n\r\n

\u96fb\u5b50\u7dda\u5f8c\u65b9\u6563\u4e71\u56de\u6298\u88c5\u7f6e(EBSD)\u7c21\u6613\u30de\u30cb\u30e5\u30a2\u30eb\u6e2c\u5b9a\u7de820230407<\/a>\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9<\/a><\/div>\r\n\r\n\r\n\r\n
\"\"<\/figure>\r\n\r\n\r\n\r\n

AES(\u30aa\u30fc\u30b8\u30a7\u96fb\u5b50\u5206\u5149\u88c5\u7f6e)<\/strong>\u3067\u306f\u8a66\u6599\u6700\u8868\u9762(~6nm)<\/strong>\u306e\u96fb\u5b50\u30d3\u30fc\u30e0\u30b9\u30dd\u30c3\u30c8\u5f84\u30ec\u30d9\u30eb(\u6700\u5c0f8nm)<\/strong>\u306e\u9818\u57df\u306b\u3064\u3044\u3066\u306e\u5143\u7d20\u5206\u6790\u30fb\u5316\u5b66\u72b6\u614b\u5206\u6790<\/strong>\u304c\u51fa\u6765\u307e\u3059\u3002<\/p>\r\n\r\n\r\n\r\n

\u8a66\u6599\u306b\u96fb\u5b50\u7dda\u3092\u7167\u5c04\u3057\u3066\u3001\u30aa\u30fc\u30b8\u30a7\u9077\u79fb\u306b\u3088\u3063\u3066\u8a66\u6599\u8868\u9762\u304b\u3089\u653e\u51fa\u3055\u308c\u308b\u30aa\u30fc\u30b8\u30a7\u96fb\u5b50<\/strong>\u3092\u5206\u5149\u30fb\u691c\u51fa\u3057\u307e\u3059\u3002\u3053\u306e\u30aa\u30fc\u30b8\u30a7\u96fb\u5b50\u306e\u904b\u52d5\u30a8\u30cd\u30eb\u30ae\u30fc\u306f\u96fb\u5b50\u8ecc\u9053\u306e\u6e96\u4f4d\u5dee\u306b\u76f8\u5f53\u3059\u308b\u30a8\u30cd\u30eb\u30ae\u30fc(\u7279\u6027X\u7dda\u306b\u76f8\u5f53\u3059\u308b)\u3092\u6301\u3063\u3066\u653e\u51fa\u3055\u308c\u307e\u3059\u3002\u5f97\u3089\u308c\u308b\u30aa\u30fc\u30b8\u30a7\u30b9\u30da\u30af\u30c8\u30eb\u306f\u5143\u7d20\u30fb\u5316\u5b66\u72b6\u614b\u306b\u7279\u6709\u306e\u30d4\u30fc\u30af\u4f4d\u7f6e\u30fb\u5f62\u72b6\u3092\u6301\u3064\u4e8b\u304b\u3089\u3001\u5143\u7d20\u30fb\u5316\u5b66\u72b6\u614b\u306e\u540c\u5b9a\u30fb\u5b9a\u91cf<\/strong>\u3092\u884c\u3048\u307e\u3059\u3002 \u6e2c\u5b9a\u51fa\u6765\u308b\u5143\u7d20\u306fLi\u4ee5\u4e0a\u306e\u5168\u5143\u7d20<\/strong>\u3067\u3001Li\u304c\u6e2c\u5b9a\u53ef\u80fd\u3067\u3042\u308b\u70b9\u304c\u7279\u5fb4\u3067\u3059\u3002\u5149\u96fb\u5b50\u5206\u5149\u88c5\u7f6e\u3068\u6bd4\u8f03\u3059\u308b\u3068\u9077\u79fb\u91d1\u5c5e\u306e\u5206\u6790<\/strong>\u3092\u5f97\u610f\u3068\u3057\u307e\u3059\u3002\u691c\u51fa\u4e0b\u9650\u306f0.1~1atm%<\/strong>\u307b\u3069\u3067\u3059\u3002 \u6e2c\u5b9a\u8a66\u6599<\/strong>\u306f\u30db\u30eb\u30c0\u30fc\u3078\u306e\u642d\u8f09\u30b5\u30a4\u30ba(\u6700\u592720mm\u03a6\u00d75mmH<\/strong>)\u306b\u53ce\u307e\u3063\u3066\u3044\u308b\u56fa\u5f62\u7269\u3067\u3042\u308c\u3070\u3001\u7d1b\u4f53\u3067\u3042\u3063\u3066\u3082\u554f\u984c\u3042\u308a\u307e\u305b\u3093\u3002\u307e\u305f\u3001\u5c0e\u96fb\u6027\u304c\u3042\u307e\u308a\u306a\u3044\u8a66\u6599<\/strong>\u3067\u3042\u3063\u3066\u3082\u3001\u30c1\u30e3\u30fc\u30b8\u30a2\u30c3\u30d7\u73fe\u8c61\u3092\u3042\u308b\u7a0b\u5ea6\u7de9\u548c\u3055\u305b\u305f\u6e2c\u5b9a(\u4e2d\u548c\u96fb\u5b50\u9283\u3001\u9ad8\u50be\u659c\u3067\u306e\u5206\u6790<\/strong>)\u3082\u884c\u3048\u307e\u3059\u3002\u65ad\u9762\u89b3\u5bdf\u7528\u30db\u30eb\u30c0\u30fc<\/strong>\u3082\u7528\u610f\u304c\u3042\u308a\u3001\u8a66\u6599\u3092\u7acb\u3066\u3066\u5206\u6790\u3059\u308b\u4e8b\u3082\u53ef\u80fd\u3067\u3059\u3002 AES\u672c\u4f53\u306f\u30b7\u30e7\u30c3\u30c8\u30ad\u30fc\u96fb\u754c\u653e\u51fa\u578b\u306eFE-SEM<\/strong>\u3067\u3042\u308a\u3001SEM\u3068\u3057\u30662\u6b21\u96fb\u5b50\u50cf\u89b3\u5bdf<\/strong>\u306e\u4ed6\u3001\u53cd\u5c04\u96fb\u5b50\u50cf(COMPO\u50cf\u3001TOPO\u50cf)\u306e\u89b3\u5bdf<\/strong>\u3082\u884c\u3046\u4e8b\u304c\u51fa\u6765\u307e\u3059\u3002\u7167\u5c04\u3059\u308b\u96fb\u5b50\u7dda<\/strong>\u306f\u52a0\u901f\u96fb\u57270.5~30\uff4bV\u3001\u96fb\u6d41\u91cf10-11~2\u00d710-7A<\/strong>\u307e\u3067\u3067\u3001\u4e8c\u6b21\u96fb\u5b50\u306e\u5206\u89e3\u80fd\u306f3nm<\/strong>\u3067\u3059\u3002\u307e\u305f\u3001\u30aa\u30fc\u30b8\u30a7\u5206\u6790\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u5206\u89e3\u80fd(\u0394E\/E)\u306f0.05%~0.6%<\/strong>\u3067\u3059\u3002 \u5f53\u88c5\u7f6e\u306fAr+\u30a4\u30aa\u30f3\u30ac\u30f3<\/strong>\u3092\u642d\u8f09\u3057\u3066\u304a\u308a\u3001\u8a66\u6599\u306bAr+\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u3092\u7167\u5c04\u3057\u3066\u8868\u9762\u306e\u30a8\u30c3\u30c1\u30f3\u30b0<\/strong>\u3092\u884c\u3048\u307e\u3059\u3002\u8868\u9762\u306e\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u306e\u9664\u53bb<\/strong>\u3084\u3001Ar+\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u6e2c\u5b9a\u3092\u7e70\u308a\u8fd4\u3059\u4e8b\u3067\u6df1\u3055\u65b9\u5411\u306e\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb<\/strong>\u3092\u5f97\u308b\u4e8b\u304c\u53ef\u80fd\u3067\u3059\u3002 \u6e2c\u5b9a\u6cd5\u3068\u3057\u3066\u306f\u5e83\u7bc4\u56f2\u306e\u30aa\u30fc\u30b8\u30a7\u30b9\u30da\u30af\u30c8\u30eb\u3092\u53d6\u5f97\u3059\u308bWide scan<\/strong>\u3001\u5404\u5143\u7d20\u30d4\u30fc\u30af\u4f4d\u7f6e\u306e\u30b9\u30da\u30af\u30c8\u30eb\u306e\u307f\u3092\u53d6\u5f97\u3059\u308bSplit scan<\/strong>\u306e\u4ed6\u3001Depth profile<\/strong>(Ar+\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u5229\u7528\u3057\u305f\u6df1\u3055\u65b9\u5411\u5206\u6790)\u3001Line profile<\/strong>\u3001Auger image<\/strong>(\u5143\u7d20\u30de\u30c3\u30d4\u30f3\u30b0)\u304c\u3042\u308a\u307e\u3059\u3002 \u30c7\u30fc\u30bf\u51e6\u7406\u3067\u306f\u5b9a\u6027\u30fb\u5b9a\u91cf\u5206\u6790\u3001\u5fae\u5206\u30fb\u5e73\u6ed1\u5316\u51e6\u7406\u3001\u753b\u50cf\u51e6\u7406\u306a\u3069\u304c\u884c\u3048\u307e\u3059\u3002\u5c02\u7528\u30bd\u30d5\u30c8\u300cspectra investigator\u300d\u3067\u306e\u30b9\u30da\u30af\u30c8\u30eb\u6ce2\u5f62\u5206\u96e2\u8a08\u7b97<\/strong>\u3082\u53ef\u80fd\u3067\u3059\u3002\u5927\u6c17\u975e\u66dd\u9732\u7528\u30c8\u30e9\u30f3\u30b9\u30d5\u30a1\u30fc\u30d9\u30c3\u30bb\u30eb\u3082\u88c5\u5099\u304c\u3042\u308a\u3001\u8a66\u6599\u306e\u5927\u6c17\u975e\u66dd\u9732\u5c0e\u5165\u304c\u53ef\u80fd\u3067\u3059\u3002\u307e\u305f\u65b0\u305f\u306b\u300cSpectrum imaging\u300d\u30bd\u30d5\u30c8\u30a6\u30a7\u30a2\u3092\u5c0e\u5165\u3057\u307e\u3057\u305f\u3002\u6e2c\u5b9a\u8996\u91ce\u306e\u5168\u30d4\u30af\u30bb\u30eb\u306e\u30b9\u30da\u30af\u30c8\u30eb\u60c5\u5831\u3092\u5185\u5305\u3057\u305f\u30c7\u30fc\u30bf\u30ad\u30e5\u30fc\u30d6\u3092\u53d6\u5f97\u3059\u308b\u3053\u3068\u3067\u3001\u5168\u30d4\u30af\u30bb\u30eb\u306e\u30b9\u30da\u30af\u30c8\u30eb\u60c5\u5831\u3092\u78ba\u8a8d\u3057\u306a\u304c\u3089\u3001\u30b9\u30da\u30af\u30c8\u30eb\u30c7\u30fc\u30bf\u304b\u3089\u5143\u7d20\u30de\u30c3\u30d7\u3092\u4f5c\u6210\u3059\u308b\u3053\u3068\u304c\u53ef\u80fd\u3067\u3059\u3002<\/p>\r\n\r\n\r\n\r\n

\"\"\r\n
\u8a66\u6599\u30db\u30eb\u30c0\u30fc<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n
\"\"\r\n
\u30aa\u30fc\u30b8\u30a7\u30b9\u30da\u30af\u30c8\u30eb<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n
\"\"\r\n
Depth Profile<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n
\"\"\r\n
Spectrum imaging<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n

\u3000\u307e\u305f\u3001AES\u306b\u306fEBSD(\u96fb\u5b50\u5f8c\u65b9\u6563\u4e71\u56de\u6298)<\/strong>\u306e\u7d50\u6676\u65b9\u4f4d\u89e3\u6790\u304c\u53ef\u80fd\u306a\u691c\u51fa\u5668\u3082\u5099\u3048\u3066\u3042\u308a\u3001\u30aa\u30fc\u30b8\u30a7\u5206\u6790\u3068\u5171\u306b\u540c\u9818\u57df\u306e\u83ca\u6c60\u30d1\u30bf\u30fc\u30f3\u3092\u53d6\u5f97\u3057\u3066\u7d50\u6676\u65b9\u4f4d\u3092\u89e3\u6790\u3059\u308b\u4e8b\u304c\u51fa\u6765\u307e\u3059<\/strong>\u3002EBSD\u306fOIM\u793e\u306eORION\u691c\u51fa\u5668\u304c\u88c5\u5099\u3055\u308c\u3066\u304a\u308a\u3001\u6700\u5927\u901f\u5ea61700fps\u3067\u306e\u6e2c\u5b9a\u304c\u5b9f\u65bd\u51fa\u6765\u307e\u3059(\u8a66\u6599\u306b\u3088\u308a\u307e\u3059)\u3002100\u4e07\u70b9\u306eIPF\u753b\u50cf\u53d6\u5f97\u304c10\u5206\u7a0b\u5ea6\u3067\u884c\u3048\u308b\u6a5f\u7a2e\u3067\u3059\u3002\u6e2c\u5b9a\u30bd\u30d5\u30c8\u30a6\u30a7\u30a2\u306fAPEX\u3001\u89e3\u6790\u30bd\u30d5\u30c8\u30a6\u30a7\u30a2\u306fOIM Analysis 8\u3067\u3001\u518d\u30b9\u30ad\u30e3\u30f3\u3082\u5b9f\u65bd\u53ef\u80fd\u3067\u3059\u3002<\/p>\r\n\r\n\r\n\r\n

\u3000 AES\u3084EBSD\u306b\u3088\u308b\u8a66\u6599\u306e\u65ad\u9762\u5206\u6790\u3067\u306f\u3001\u52a0\u5de5\u6b6a\u307f\u306e\u306a\u3044\u65ad\u9762\u4f5c\u88fd\u304c\u4f55\u3088\u308a\u91cd\u8981\u3067\u3059\u3002\u5f53\u65bd\u8a2d\u306b\u306fAES\u3084EBSD\u3067\u306e\u65ad\u9762\u5206\u6790\u306b\u5bfe\u5fdc\u51fa\u6765\u308b\u65ad\u9762\u4f5c\u88fd\u304c\u53ef\u80fd\u306aCP(\u30af\u30ed\u30b9\u30bb\u30af\u30b7\u30e7\u30f3\u30dd\u30ea\u30c3\u30b7\u30e3)<\/strong>\u3001CCP(\u30af\u30e9\u30a4\u30aa\u30af\u30ed\u30b9\u30bb\u30af\u30b7\u30e7\u30f3\u30dd\u30ea\u30c3\u30b7\u30e3)<\/strong>\u3082\u7528\u610f\u304c\u3042\u308a\u3001\u8a66\u6599\u4f5c\u88fd\u304b\u3089\u5206\u6790\u30fb\u89e3\u6790\u307e\u3067\u3092\u4e00\u8cab\u3057\u3066\u884c\u3046\u4e8b\u304c\u51fa\u6765\u307e\u3059\u3002<\/p>\r\n\r\n\r\n\r\n

\"\"\r\n
ORION\u691c\u51fa\u5668<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n
\"\"\r\n
APEX\u30bd\u30d5\u30c8\u30a6\u30a7\u30a2<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n
\"\"\r\n
Cu\u8a66\u6599\u306e500\u4e07\u70b9IPF\u30de\u30c3\u30d7<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n
\"\"\r\n
Cu\u8a66\u6599\u306e500\u4e07\u70b9IQ\u30de\u30c3\u30d7+boundary<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n

SEM(\u8d70\u67fb\u96fb\u5b50\u9855\u5fae\u93e1\u3000JSM-6510LA\u3000EDS\u88c5\u5099)<\/h2>\r\n\r\n\r\n\r\n

\u8d70\u67fb\u96fb\u5b50\u9855\u5fae\u93e1(SEM)\u7c21\u6613\u30de\u30cb\u30e5\u30a2\u30eb20220202<\/a><\/p>\r\n\r\n\r\n\r\n

\u30a8\u30cd\u30eb\u30ae\u30fc\u5206\u6563\u578bX\u7dda\u5206\u6790\u88c5\u7f6e(EDS)\u7c21\u6613\u30de\u30cb\u30e5\u30a2\u30eb20200304<\/a><\/p>\r\n\r\n\r\n\r\n

SEM basic manual 20200302<\/a><\/p>\r\n\r\n\r\n\r\n

EDS basic manual 20200304<\/a><\/p>\r\n\r\n\r\n\r\n

\"\"<\/figure>\r\n\r\n\r\n\r\n

SEM(\u8d70\u67fb\u96fb\u5b50\u9855\u5fae\u93e1)<\/strong>\u306f\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u30d5\u30a3\u30e9\u30e1\u30f3\u30c8\u306e\u71b1\u96fb\u5b50\u9283\u30bf\u30a4\u30d7\u3067\u3059\u3002\u6c4e\u7528\u578b\u3067\u975e\u5e38\u306b\u4f7f\u3044\u3084\u3059\u3044\u4ed5\u69d8\u306b\u306a\u3063\u3066\u3044\u307e\u3059\u3002 \u5206\u89e3\u80fd\u306f\u6700\u5c0f\u30673.0nm(30kV)<\/strong>\u3001\u52a0\u901f\u96fb\u5727\u306f0.3kV~30kV<\/strong>\u307e\u3067\u53ef\u5909\u3067\u3059\u3002SEM\u3068\u3057\u3066\u4e8c\u6b21\u96fb\u5b50\u50cf\u3092\u53d6\u5f97\u51fa\u6765\u308b\u4ed6\u3001\u53cd\u5c04\u96fb\u5b50\u50cf(COMPO\u50cf\u3001TOPO\u50cf)<\/strong>\u306e\u89b3\u5bdf\u3082\u53ef\u80fd\u3067\u3059\u3002 EDS(\u30a8\u30cd\u30eb\u30ae\u30fc\u5206\u6563\u578bX\u7dda\u5206\u6790\u88c5\u7f6e)<\/strong>\u3092\u88c5\u5099\u3057\u3066\u304a\u308a\u3001\u8a66\u6599\u8868\u9762\u306e\u5143\u7d20\u540c\u5b9a\u3001\u5b9a\u91cf<\/strong>\u3092\u884c\u3048\u307e\u3059\u3002\u6e2c\u5b9a\u6cd5\u306b\u306f\u70b9\u5206\u6790\u3001\u30a8\u30ea\u30a2\u5206\u6790\u3001\u7dda\u5206\u6790\u3001\u30de\u30c3\u30d4\u30f3\u30b0<\/strong>\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\r\n\r\n\r\n\r\n

\u30c1\u30e3\u30f3\u30d0\u30fc\u5185\u306e\u771f\u7a7a\u6392\u6c17\u306b\u306f\u4f4e\u771f\u7a7a\u30e2\u30fc\u30c9<\/strong>\u304c\u7528\u610f\u3055\u308c\u3066\u304a\u308a\u300110\uff5e270Pa<\/strong>\u306e\u4f4e\u771f\u7a7a\u5727\u529b\u3067\u306e\u8a66\u6599\u89b3\u5bdf\u3084EDS\u5206\u6790\u304c\u53ef\u80fd\u3067\u3059(\u53cd\u5c04\u96fb\u5b50\u50cf\u306e\u307f)\u3002\u751f\u7269\u8a66\u6599\u3084\u542b\u6c34\u8a66\u6599\u3092\u7279\u5225\u306a\u524d\u51e6\u7406\u306a\u304f\u3001\u305d\u306e\u307e\u307e\u89b3\u5bdf\u3059\u308b\u4e8b\u304c\u51fa\u6765\u307e\u3059\u3002<\/p>\r\n\r\n\r\n\r\n

\"\"\r\n
\u30bf\u30f3\u30dd\u30dd\u306e\u82b1\u7c89BSE\u50cf<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n

CP(\u30af\u30ed\u30b9\u30bb\u30af\u30b7\u30e7\u30f3\u30dd\u30ea\u30c3\u30b7\u30e3\u3000SM-09010)<\/h2>\r\n\r\n\r\n\r\n
\"\"\r\n
<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n

\u30af\u30ed\u30b9\u30bb\u30af\u30b7\u30e7\u30f3\u30dd\u30ea\u30c3\u30b7\u30e3\u30fc(CP)\u7c21\u6613\u30de\u30cb\u30e5\u30a2\u30eb20200827<\/a><\/p>\r\n\r\n\r\n\r\n

\u8a66\u6599\u306e\u65ad\u9762\u3092Ar\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u3067\u524a\u308a\u51fa\u3057\u3066\u4f5c\u6210\u3059\u308b\u4e8b\u304c\u51fa\u6765\u307e\u3059\u3002\u6a5f\u68b0\u7814\u78e8\u3067\u751f\u3058\u3066\u3057\u307e\u3046\u3088\u3046\u306a\u30c0\u30e1\u30fc\u30b8\u5c64\u3092\u5f62\u6210\u305b\u305a\u3001\u7dba\u9e97\u306a\u65ad\u9762\u3092\u4f5c\u308b\u4e8b\u304c\u51fa\u6765\u308b\u306e\u3067\u3001\u7d30\u304b\u3044\u5c64\u69cb\u9020\u3084\u5fae\u7c92\u5b50\u306eSEM\u65ad\u9762\u89b3\u5bdf\u306f\u3082\u3061\u308d\u3093\u3001EBSD\u306e\u6e2c\u5b9a\u3001AES\u306e\u5206\u6790\u306b\u9069\u3057\u305f\u65ad\u9762\u3092\u7528\u610f\u51fa\u6765\u307e\u3059\u3002<\/p>\r\n\r\n\r\n\r\n

\"\"\r\n
microSD\u306eCP\u52a0\u5de5\u65ad\u9762<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n
\"\"\r\n
\u7c89\u672b\u8a66\u6599\u306eCP\u65ad\u9762\u4f5c\u88fd<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n

AFM(\u539f\u5b50\u9593\u529b\u9855\u5fae\u93e1\u3000SPA-400)<\/h2>\r\n\r\n\r\n\r\n

 <\/p>\r\n\r\n\r\n\r\n

\u539f\u5b50\u9593\u529b\u9855\u5fae\u93e1(AFM)\u7c21\u6613\u30de\u30cb\u30e5\u30a2\u30eb20240402<\/a><\/p>\r\n\r\n\r\n\r\n

\"\"\r\n
<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n

\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30aa\u30fc\u30c0\u30fc\u3067\u8a66\u6599\u306e\u51f9\u51f8\u3092\u6e2c\u5b9a\u3059\u308b\u4e8b\u304c\u51fa\u6765\u307e\u3059\u3002\u30ab\u30f3\u30c1\u30ec\u30d0\u30fc\u30db\u30eb\u30c0\u30fc\u306fAFM\u7528\u3068DFM\u7528\u304c\u3001\u30b9\u30ad\u30e3\u30ca\u30fc\u306f20\u03bcm\u3001100\u03bcm\u306e2\u7a2e\u985e\u304c\u7528\u610f\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u30ab\u30f3\u30c1\u30ec\u30d0\u30fc\u306b\u3064\u3044\u3066\u306f\u57fa\u672c\u7684\u306b\u30e6\u30fc\u30b6\u30fc\u3054\u672c\u4eba\u306b\u3054\u7528\u610f\u3057\u3066\u9802\u304d\u307e\u3059(\u3054\u76f8\u8ac7\u4e0b\u3055\u3044)\u3002\u305d\u306e\u4ed6AFM\u3092\u5229\u7528\u3057\u305f\u7279\u6b8a\u306a\u6e2c\u5b9a\u30fb\u89e3\u6790\u3092\u884c\u3044\u305f\u3044\u5834\u5408\u306b\u3064\u3044\u3066\u3082\u3054\u76f8\u8ac7\u4e0b\u3055\u3044\u3002<\/p>\r\n\r\n\r\n\r\n

\"\"\r\n
\u30b5\u30f3\u30d7\u30eb\u3068\u30ab\u30f3\u30c1\u30ec\u30d0\u30fc<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n
\"\"\r\n
\u65ad\u9762\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n
\"\"\r\n
\u30de\u30a4\u30ab\u306e\u539f\u5b50\u50cf<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n

LSCM(\u5171\u7126\u70b9\u30ec\u30fc\u30b6\u30fc\u8d70\u67fb\u578b\u9855\u5fae\u93e1\u30001LM21D)<\/h2>\r\n\r\n\r\n\r\n
\u5171\u7126\u70b9\u30ec\u30fc\u30b6\u8d70\u67fb\u578b\u9855\u5fae\u93e1\u7c21\u6613\u30de\u30cb\u30e5\u30a2\u30eb20230410<\/a>\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9<\/a><\/div>\r\n\r\n\r\n\r\n
\"\"\r\n
<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n

\u7126\u70b9\u8ddd\u96e2\u304c\u3070\u3089\u3070\u3089\u306b\u306a\u308b\u3088\u3046\u306a\u539a\u3044\u8a66\u6599\u3067\u3042\u3063\u3066\u3082\u30dc\u30b1\u306e\u306a\u3044\u8868\u9762\u306e\u50cf\u3092\u5f97\u308b\u4e8b\u304c\u51fa\u6765\u307e\u3059\u3002 \u307e\u305f\u3001\u30de\u30a4\u30af\u30ed\u30e1\u30fc\u30c8\u30eb\u30aa\u30fc\u30c0\u30fc\u3067\u8868\u9762\u306e\u51f9\u51f8\u60c5\u5831\u3092\u6e2c\u5b9a\u30013\u6b21\u5143\u753b\u50cf\u306a\u3069\u306e\u89e3\u6790\u304c\u51fa\u6765\u307e\u3059\u3002\u63a5\u773c\u30ec\u30f3\u30ba\u306fx20\u3001\u5bfe\u7269\u30ec\u30f3\u30ba\u306fx5, x10, x20, x50, x100\u304c\u88c5\u5099\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\r\n\r\n\r\n\r\n

\"\"\r\n
FSM\u753b\u50cf<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n
\"\"\r\n
2\u6b21\u5143Z\u753b\u50cf<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n

CCP(\u30af\u30e9\u30a4\u30aa\u30af\u30ed\u30b9\u30bb\u30af\u30b7\u30e7\u30f3\u30dd\u30ea\u30c3\u30b7\u30e3\u3000IB-19520CCP)<\/h2>\r\n\r\n\r\n\r\n
\u30af\u30e9\u30a4\u30aa\u30af\u30ed\u30b9\u30bb\u30af\u30b7\u30e7\u30f3\u30dd\u30ea\u30c3\u30b7\u30e3\u30fc(CCP)\u7c21\u6613\u30de\u30cb\u30e5\u30a2\u30eb20230314<\/a>\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9<\/a><\/div>\r\n\r\n\r\n\r\n
\"\"<\/figure>\r\n\r\n\r\n\r\n

\u8a66\u6599\u306e\u65ad\u9762\u3092Ar\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u3067\u524a\u308a\u51fa\u3057\u3066\u4f5c\u6210\u3059\u308b\u4e8b\u304c\u51fa\u6765\u307e\u3059\u3002\u6a5f\u68b0\u7814\u78e8\u3067\u751f\u3058\u3066\u3057\u307e\u3046\u3088\u3046\u306a\u30c0\u30e1\u30fc\u30b8\u5c64\u3092\u5f62\u6210\u305b\u305a\u3001\u7dba\u9e97\u306a\u65ad\u9762\u3092\u4f5c\u308b\u4e8b\u304c\u51fa\u6765\u308b\u306e\u3067\u3001\u7d30\u304b\u3044\u5c64\u69cb\u9020\u3084\u5fae\u7c92\u5b50\u306eSEM\u65ad\u9762\u89b3\u5bdf\u306f\u3082\u3061\u308d\u3093\u3001EBSD\u306e\u6e2c\u5b9a\u3001AES\u306e\u5206\u6790\u306b\u9069\u3057\u305f\u65ad\u9762\u3092\u7528\u610f\u51fa\u6765\u307e\u3059\u3002CP\u3068\u7570\u306a\u308a\u3001\u52a0\u5de5\u4e2d\u306e\u8a66\u6599\u306e\u69d8\u5b50\u3092\u5185\u90e8CCD\u30ab\u30e1\u30e9\u3067\u89b3\u5bdf\u3059\u308b\u4e8b\u304c\u51fa\u6765\u307e\u3059\u3002\u307e\u305f\u672c\u88c5\u7f6e\u306f\u6db2\u4f53\u7a92\u7d20\u3092\u5229\u7528\u3057\u3066\u30b9\u30c6\u30fc\u30b8\u3092-120\u2103\u307e\u3067\u51b7\u5374\u3057\u306a\u304c\u3089\u52a0\u5de5\u3092\u5b9f\u65bd\u3059\u308b\u4e8b\u304c\u53ef\u80fd\u306a\u4ed6\u3001\u81ea\u52d5\u9593\u6b20\u7167\u5c04\u6a5f\u80fd\u3001\u81ea\u52d5\u4ed5\u4e0a\u3052\u52a0\u5de5\u6a5f\u80fd\u3082\u3042\u308a\u3001\u71b1\u30c0\u30e1\u30fc\u30b8\u306b\u5f31\u3044\u8a66\u6599\u306a\u3069\u306b\u6709\u52b9\u3067\u3059\u3002\u3055\u3089\u306b\u30c8\u30e9\u30f3\u30b9\u30d5\u30a1\u30fc\u30d9\u30c3\u30bb\u30eb\u306b\u3088\u308b\u5927\u6c17\u975e\u66dd\u9732\u8f38\u9001\u304c\u884c\u3048\u305f\u308a\u3001\u5927\u578b\u8a66\u6599\u56de\u8ee2\u30db\u30eb\u30c0\u30fc\u306b\u3088\u308b\u8868\u9762\u52a0\u5de5\u304c\u884c\u3048\u308b\u306a\u3069\u3001\u591a\u6a5f\u80fd\u306a\u8a66\u6599\u52a0\u5de5\u88c5\u7f6e\u3067\u3059\u3002<\/p>\r\n\r\n\r\n\r\n

\"\"\r\n
\u4f4e\u878d\u70b9\u5408\u91d1\u306e\u52a0\u5de5\u65ad\u9762(\u30af\u30e9\u30a4\u30aa\u6a5f\u80fd\u306a\u3057)<\/figcaption>\r\n<\/figure>\r\n\r\n\r\n\r\n
\"\"\r\n
\u4f4e\u878d\u70b9\u5408\u91d1\u306e\u52a0\u5de5\u65ad\u9762(\u30af\u30e9\u30a4\u30aa\u6a5f\u80fd\u3042\u308a)<\/figcaption>\r\n<\/figure>\r\n","protected":false},"excerpt":{"rendered":"

XPS(\u5149\u96fb\u5b50\u5206\u5149\u88c5\u7f6e\u3000JPS-9200) XPS(\u5149\u96fb\u5b50\u5206\u5149\u88c5\u7f6e)\u3067\u306f\u3001\u8a66\u6599\u6700\u8868\u9762(~6nm)\u306e\u30013mm\u03a6\uff5e0.03mm\u03c6\u306e\u9818\u57df\u306b\u3064\u3044\u3066\u306e\u5143\u7d20\u5206\u6790\u3001\u5316\u5b66\u72b6\u614b\u5206\u6790\u3092\u884c\u3046\u4e8b\u304c\u51fa\u6765\u307e\u3059\u3002\u8a66\u6599\u306bX\u7dda\u3092\u7167\u5c04\u3057\u3066\u3001\u5149\u96fb\u52b9\u679c\u306b\u3088\u308a\u8a66… <\/p>\n","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"_links":{"self":[{"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/pages\/2834"}],"collection":[{"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/comments?post=2834"}],"version-history":[{"count":25,"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/pages\/2834\/revisions"}],"predecessor-version":[{"id":3435,"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/pages\/2834\/revisions\/3435"}],"wp:attachment":[{"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/media?parent=2834"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}