\t\t\t\tRepair of XPS of Ar + ion gun has been completed.<\/p>\n

As usual, it is possible that contamination removal and depth profile by Ar+ ion etching<\/p>\n

With the maintenance of ion gun, there is a change in the XPS settings. Please check it.<\/p>\n

\u30fbChanging the angle aperture and the field aperture values for setting the measurement area 1mm\u03c6. Each new values are\u00a0 34 and 14 from 32 and 12.<\/p>\n

\u30fbThe etching rate of Ar+ ion gun is changed in each channel.<\/p>\n

Ch1: 10.0nm \/ min<\/p>\n

Ch2: 5.6nm \/ min<\/p>\n

Ch3: 1.5nm \/ min<\/p>\n

Ch4 (Tilt-10 \u00b0 at the time): 12.0nm \/ min<\/p>\n

Please check the latest XPS measurement simple manual.<\/p>\n

X\u7dda\u5149\u96fb\u5b50\u5206\u5149\u88c5\u7f6e(XPS)\u7c21\u6613\u30de\u30cb\u30e5\u30a2\u30eb\u6e2c\u5b9a\u7de8\uff3f20150724<\/a>(sorry,\u00a0 only japanese version)<\/p>\n

 XPS\u306eAr+\u30a4\u30aa\u30f3\u30ac\u30f3\u306e\u4fee\u7406\u304c\u5b8c\u4e86\u3057\u307e\u3057\u305f\u3002<\/p>\n

\u5f93\u6765\u901a\u308a\u3001\u30a4\u30aa\u30f3\u30ac\u30f3\u3092\u5229\u7528\u3057\u305fAr+\u30a4\u30aa\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0\u306b\u3088\u308b\u30b3\u30f3\u30bf\u30df\u9664\u53bb\u3084\u30c7\u30d7\u30b9\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u304c\u53ef\u80fd\u3067\u3059\u3002<\/p>\n

\u30a4\u30aa\u30f3\u30ac\u30f3\u306e\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u306b\u4f34\u3044\u3001XPS\u306e\u8a2d\u5b9a\u306b\u5909\u66f4\u70b9\u304c\u3042\u308a\u307e\u3059\u3002\u3054\u78ba\u8a8d\u4e0b\u3055\u3044\u3002<\/p>\n

\u30fb\u6e2c\u5b9a\u9818\u57df1mm\u03a6\u8a2d\u5b9a\u6642\u306e\u89d2\u5ea6\u7d5e\u308a\uff06\u8996\u91ce\u7d5e\u308a\u306e\u5024\u304c\u305d\u308c\u305e\u308c32\u300112\u304b\u308934\u300114\u306b\u5909\u66f4<\/p>\n

\u30fbAr+\u30a4\u30aa\u30f3\u30ac\u30f3\u306e\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8\u304c\u5404\u30c1\u30e3\u30f3\u30cd\u30eb\u3067\u5909\u66f4<\/p>\n

Ch1: 10.0nm\/min<\/p>\n

Ch2: 5.6nm\/min<\/p>\n

Ch3: 1.5nm\/min<\/p>\n

Ch4(Tilt-10\u00b0\u6642): 12.0nm\/min<\/p>\n

\u6700\u65b0\u7248\u306e\u88c5\u7f6e\u30de\u30cb\u30e5\u30a2\u30eb\u306b\u3082\u8a18\u8f09\u304c\u3042\u308b\u306e\u3067\u3054\u78ba\u8a8d\u4e0b\u3055\u3044\u3002<\/p>\n

X\u7dda\u5149\u96fb\u5b50\u5206\u5149\u88c5\u7f6e(XPS)\u7c21\u6613\u30de\u30cb\u30e5\u30a2\u30eb\u6e2c\u5b9a\u7de8\uff3f20150724<\/a><\/p>\n

 \t\t<\/p>\n","protected":false},"excerpt":{"rendered":"

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