{"id":1533,"date":"2019-03-25T16:30:45","date_gmt":"2019-03-25T07:30:45","guid":{"rendered":"https:\/\/labs.eng.hokudai.ac.jp\/labo\/HUXPSLab\/?p=1533"},"modified":"2022-09-02T15:33:29","modified_gmt":"2022-09-02T06:33:29","slug":"1533","status":"publish","type":"post","link":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/afm\/1533.html","title":{"rendered":"\u88c5\u7f6e\u4f7f\u7528\u6599\u306e\u6539\u5b9a\u306b\u3064\u3044\u3066"},"content":{"rendered":"\n\t\t\t\t\n<p>\u3044\u3064\u3082\u3054\u5229\u7528\u9802\u304d\u3042\u308a\u304c\u3068\u3046\u3054\u3056\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u5168\u5b66\u5171\u540c\u5229\u7528\u65bd\u8a2d\u3000\u5149\u96fb\u5b50\u5206\u5149\u5206\u6790\u7814\u7a76\u5ba4\u306f2019\u5e744\u67081\u65e5\u3088\u308a\u88c5\u7f6e\u5229\u7528\u6599\u306b\u3064\u3044\u3066\u4e00\u90e8\u6539\u5b9a\u81f4\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u6765\u5e74\u5ea6\u304b\u3089\u306e\u88c5\u7f6e\u5229\u7528\u6599\u306f\u4ee5\u4e0b\u306e\u901a\u308a\u3067\u3059\u3002<\/p>\n\n\n\n<ul><li>\u4e00\u822c\u5229\u7528(\u5b66\u5185)<\/li><\/ul>\n\n\n\n<table class=\"wp-block-table\"><tbody><tr><td>\n  \u88c5\u3000\u3000\u3000\u7f6e\n  <\/td><td>\n  \u5229\u7528\u6599\n  <\/td><\/tr><tr><td>   X\u7dda\u5149\u96fb\u5b50\u5206\u5149\u88c5\u7f6e   (JPS-9200\uff09XPS   <\/td><td>\n  1,500\u5186\/1\u6642\u9593\n  <\/td><\/tr><tr><td>\n  \u30aa\u30fc\u30b8\u30a7\u96fb\u5b50\u5206\u5149\u88c5\u7f6e\n  (JAMP-9500F)\n  AES\n  <\/td><td>\n  1,800\u5186\/1\u6642\u9593\n  <\/td><\/tr><tr><td>\n  \u8a66\u6599\u4e88\u5099\u89b3\u5bdf\u30fb\u5143\u7d20\u5206\u6790\u88c5\u7f6e\n  (JSM-6510LA)\n  SEM\n  <\/td><td>\n  700\u5186\/1\u6642\u9593\n  <\/td><\/tr><tr><td>\n  \u65ad\u9762\u5206\u6790\u7528\u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e\n  (SM-09010) CP\n  <\/td><td>\n  500\u5186\/1\u6642\u9593\n  <\/td><\/tr><tr><td>\n  \u539f\u5b50\u9593\u529b\u9855\u5fae\u93e1\n  (SPA-400) AFM\n  <\/td><td>\n  300\u5186\/1\u6642\u9593\n  <\/td><\/tr><tr><td>\n  \u5171\u7126\u70b9\u30ec\u30fc\u30b6\u30fc\u8d70\u67fb\u578b\u9855\u5fae\u93e1\n  (1LM21D) LSCM\n  <\/td><td>\n  200\u5186\/1\u6642\u9593\n  <\/td><\/tr><\/tbody><\/table>\n\n\n\n<ul><li>\u30ca\u30ce\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u4e8b\u696d\u652f\u63f4\u7533\u8acb\u6709(\u5b66\u5185)\u203b1\uff0c2<\/li><\/ul>\n\n\n\n<table class=\"wp-block-table\"><tbody><tr><td>\n  \u88c5\u3000\u3000\u3000\u7f6e\n  <\/td><td>\n  \u5229\u7528\u6599\n  <\/td><td>\u6280\u8853\u4ee3\u884c\u6599A<br>\u203b3   <\/td><td>\u6280\u8853\u4ee3\u884c\u6599B<br>\u203b4   <\/td><\/tr><tr><td>X\u7dda\u5149\u96fb\u5b50\u5206\u5149\u88c5\u7f6e   <br>(JPS-9200) XPS   <\/td><td>1,100\u5186\/1\u6642\u9593   <\/td><td>5,100\u5186\/1\u6642\u9593   <\/td><td>9,100\u5186\/1\u6642\u9593   <\/td><\/tr><tr><td>\u30aa\u30fc\u30b8\u30a7\u96fb\u5b50\u5206\u5149\u88c5\u7f6e  <br> (JAMP-9500F)   AES   <\/td><td>1,400\u5186\/1\u6642\u9593   <\/td><td>5,400\u5186\/1\u6642\u9593   <\/td><td>9,400\u5186\/1\u6642\u9593   <\/td><\/tr><tr><td>\u8a66\u6599\u4e88\u5099\u89b3\u5bdf\u30fb\u5143\u7d20\u5206\u6790\u88c5\u7f6e  <br>(JSM-6510LA)   SEM   <\/td><td>500\u5186\/1\u6642\u9593   <\/td><td>\uff0d<\/td><td>\uff0d   \u00a0   <\/td><\/tr><tr><td>\u65ad\u9762\u5206\u6790\u7528\u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e  <br>(SM-09010) CP   <\/td><td>300\u5186\/1\u6642\u9593   <\/td><td>\uff0d<\/td><td>\uff0d   \u00a0   <\/td><\/tr><tr><td>\u539f\u5b50\u9593\u529b\u9855\u5fae\u93e1 <br> (SPA-400) AFM   <\/td><td>300\u5186\/1\u6642\u9593   <\/td><td>\uff0d<\/td><td>\uff0d   \u00a0   <\/td><\/tr><tr><td>\u5171\u7126\u70b9\u30ec\u30fc\u30b6\u30fc\u8d70\u67fb\u578b\u9855\u5fae\u93e1<br>(1LM21D) LSCM   <\/td><td>200\u5186\/1\u6642\u9593   <\/td><td>\uff0d   \u00a0   <\/td><td>\uff0d<\/td><\/tr><\/tbody><\/table>\n\n\n\n<p>\u203b1\u30ca\u30ce\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u4e8b\u696d\u306e\u652f\u63f4\u8ab2\u984c\u7533\u8acb\u66f8\u3092\u63d0\u51fa\u3055\u308c\u305f\u88c5\u7f6e\u5229\u7528\u8005\u307e\u305f\u306f\u305d\u306e\u7533\u8acb\u306e\u95a2\u9023\u7814\u7a76\u8005\u7b49\u306b\u8a18\u8f09\u304c\u3042\u308b\u88c5\u7f6e\u5229\u7528\u8005\u3067\u88c5\u7f6e\u5229\u7528\u304c\u305d\u306e\u7533\u8acb\u8ab2\u984c\u306b\u57fa\u3065\u304f\u5229\u7528\u3067\u3042\u308b\u3002\u4e14\u3064\u3001\u305d\u306e\u7533\u8acb\u8ab2\u984c\u3067\u5e74\u5ea6\u4e2d\u306b\u672c\u65bd\u8a2d\u306e\u5149\u96fb\u5b50\u5206\u5149\u88c5\u7f6e\uff08XPS\uff09\u307e\u305f\u306f\u30aa\u30fc\u30b8\u30a7\u96fb\u5b50\u5206\u5149\u88c5\u7f6e\uff08AES\uff09\u306e\u5229\u7528\u304c\u3042\u308b\u5834\u5408\u306b\u672c\u533a\u5206\u306e\u6599\u91d1\u3092\u9069\u7528\u3055\u308c\u308b\u3002<\/p>\n\n\n\n<p>\u203b2\u88c5\u7f6e\u4e88\u7d04\u6642\u306b\u8ab2\u984c\u756a\u53f7\u306e\u5165\u529b\u304c\u5fc5\u8981\u3002<\/p>\n\n\n\n<p>\u203b3\u5229\u7528\u8005\u304c\u88c5\u7f6e\u8b1b\u7fd2\u3092\u53d7\u3051\u305a\u3001\u88c5\u7f6e\u30aa\u30da\u30ec\u30fc\u30b7\u30e7\u30f3\u3092\u6280\u8853\u8077\u54e1\u306b\u4e00\u4efb\u3057\u3066\u5229\u7528\u8005\u306e\u6307\u793a\u306e\u4e0b\u3067\u6e2c\u5b9a\u3092\u884c\u3046\u5834\u5408\u3002<\/p>\n\n\n\n<p>\u203b4\u5229\u7528\u8005\u304c\u88c5\u7f6e\u8b1b\u7fd2\u3092\u53d7\u3051\u305a\u3001\u88c5\u7f6e\u30aa\u30da\u30ec\u30fc\u30b7\u30e7\u30f3\u3092\u6280\u8853\u8077\u54e1\u306b\u4e00\u4efb\u3057\u3066\u5229\u7528\u8005\u306e\u6307\u793a\u306e\u4e0b\u3067\u9ad8\u5ea6\u306a\u6e2c\u5b9a\u3084\u30c7\u30fc\u30bf\u89e3\u6790\u3092\u884c\u3046\u5834\u5408\u3002<\/p>\n\n\n\n<ul><li> \u5b66\u5916(\u5927\u5b66\u30fb\u516c\u7684\u6a5f\u95a2)<\/li><\/ul>\n\n\n\n<table class=\"wp-block-table\"><tbody><tr><td>\u3000\u88c5\u3000\u3000\u3000\u7f6e  <\/td><td>\u521d\u56de\u8b1b\u7fd2\u6599<\/td><td>\u5229\u7528\u6599\u3000  <\/td><td>\u6280\u8853\u4ee3\u884c\u6599A\u203b3   <\/td><td>\u6280\u8853\u4ee3\u884c\u6599B\u203b4  <\/td><\/tr><tr><td>X\u7dda\u5149\u96fb\u5b50\u5206\u5149\u88c5\u7f6e<br>(JPS-9200) XPS   <\/td><td>32,000\u5186<br>\/1\u56de   <\/td><td>1,700\u5186<br>\/1\u6642\u9593<\/td><td>5,700\u5186<br>\/1\u6642\u9593   <\/td><td>9,700\u5186<br>\/1\u6642\u9593   <\/td><\/tr><tr><td>\u30aa\u30fc\u30b8\u30a7\u96fb\u5b50\u5206\u5149\u88c5\u7f6e<br>(JAMP-9500F) AES   <\/td><td>32,000\u5186<br>\/1\u56de   <\/td><td>2,300\u5186<br>\/1\u6642\u9593   <\/td><td>6,300\u5186<br>\/1\u6642\u9593   <\/td><td>10,300\u5186<br>\/1\u6642\u9593   <\/td><\/tr><tr><td>\u8a66\u6599\u4e88\u5099\u89b3\u5bdf\u30fb\u5143\u7d20\u5206\u6790\u88c5\u7f6e<br>(JSM-6510LA) SEM<\/td><td>16,000\u5186<br>\/1\u56de   <\/td><td>800\u5186<br>\/1\u6642\u9593   <\/td><td>\uff0d   \u00a0   <\/td><td>\uff0d   \u00a0   <\/td><\/tr><tr><td>\u65ad\u9762\u5206\u6790\u7528\u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e<br>(SM-09010) CP   <\/td><td>16,000\u5186<br>\/1\u56de   <\/td><td>600\u5186<br>\/1\u6642\u9593   <\/td><td>\uff0d   \u00a0   <\/td><td>\uff0d   \u00a0   <\/td><\/tr><tr><td>\u539f\u5b50\u9593\u529b\u9855\u5fae\u93e1<br>(SPA-400) AFM   <\/td><td>8,000\u5186<br>\/1\u56de   <\/td><td>400\u5186<br>\/1\u6642\u9593   <\/td><td>\uff0d   \u00a0   <\/td><td>\uff0d   \u00a0   <\/td><\/tr><tr><td>\u5171\u7126\u70b9\u30ec\u30fc\u30b6\u30fc\u8d70\u67fb\u578b\u9855\u5fae\u93e1<br>(1LM21D) LSCM   <\/td><td>8,000\u5186<br>\/1\u56de   <\/td><td>300\u5186<br>\/1\u6642\u9593   <\/td><td>\uff0d   \u00a0   <\/td><td>\uff0d   \u00a0   <\/td><\/tr><\/tbody><\/table>\n\n\n\n<ul><li> \u5b66\u5916(\u4e00\u822c)<\/li><\/ul>\n\n\n\n<table class=\"wp-block-table\"><tbody><tr><td>\n  \u88c5\u3000\u3000\u3000\u7f6e\n  <\/td><td>\u521d\u56de\u8b1b\u7fd2\u6599   <\/td><td>\u5229\u7528\u6599   <\/td><td>\u6280\u8853\u4ee3\u884c\u6599A<br>\u203b3   <\/td><td>\u6280\u8853\u4ee3\u884c\u6599B<br>\u203b4   <\/td><\/tr><tr><td>X\u7dda\u5149\u96fb\u5b50\u5206\u5149\u88c5\u7f6e<br>(JPS-9200) XPS   <\/td><td>32,000\u5186<br>\/1\u56de   <\/td><td>5,500\u5186<br>\/1\u6642\u9593   <\/td><td>9,500\u5186<br>\/1\u6642\u9593   <\/td><td>13,500\u5186<br>\/1\u6642\u9593   <\/td><\/tr><tr><td>\u30aa\u30fc\u30b8\u30a7\u96fb\u5b50\u5206\u5149\u88c5\u7f6e<br>(JAMP-9500F)   AES<\/td><td>32,000\u5186<br>\/1\u56de   <\/td><td>8,100\u5186<br>\/1\u6642\u9593   <\/td><td>12,100\u5186<br>\/1\u6642\u9593   <\/td><td>16,100\u5186<br>\/1\u6642\u9593   <\/td><\/tr><tr><td>\u8a66\u6599\u4e88\u5099\u89b3\u5bdf\u30fb\u5143\u7d20\u5206\u6790\u88c5\u7f6e<br>(JSM-6510LA) SEM<\/td><td>16,000\u5186<br>\/1\u56de   <\/td><td>2,000\u5186<br>\/1\u6642\u9593   <\/td><td>\uff0d   \u00a0   <\/td><td>\uff0d   \u00a0   <\/td><\/tr><tr><td>\u65ad\u9762\u5206\u6790\u7528\u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e<br>(SM-09010) CP   <\/td><td>16,000\u5186<br>\/1\u56de   <\/td><td>1,100\u5186<br>\/1\u6642\u9593   <\/td><td>\uff0d   \u00a0   <\/td><td>\uff0d   \u00a0   <\/td><\/tr><tr><td>\u539f\u5b50\u9593\u529b\u9855\u5fae\u93e1<br>(SPA-400) AFM   <\/td><td>8,000\u5186<br>\/1\u56de   <\/td><td>1,600\u5186<br>\/1\u6642\u9593   <\/td><td>\uff0d   \u00a0   <\/td><td>\uff0d   \u00a0   <\/td><\/tr><tr><td>\u5171\u7126\u70b9\u30ec\u30fc\u30b6\u30fc\u8d70\u67fb\u578b\u9855\u5fae\u93e1<br>(1LM21D) LSCM   <\/td><td>8,000\u5186<br>\/1\u56de   <\/td><td>1,500\u5186<br>\/1\u6642\u9593   <\/td><td>\uff0d   \u00a0   <\/td><td>\uff0d   \u00a0   <\/td><\/tr><\/tbody><\/table>\n\n\n\n<ul><li>\u6280\u8853\u652f\u63f4\u6599<\/li><\/ul>\n\n\n\n<table class=\"wp-block-table\"><tbody><tr><td>\n  \u6280\u8853\u652f\u63f4\u5185\u5bb9\n  <\/td><td>\n  \u5358\u4fa1\n  <\/td><\/tr><tr><td>   \u6280\u8853\u652f\u63f4A\u203b5<\/td><td>\n  4,000\u5186\/1\u6642\u9593\n  <\/td><\/tr><tr><td>   \u6280\u8853\u652f\u63f4B\u203b6<\/td><td>\n  8,000\u5186\/1\u6642\u9593\n  <\/td><\/tr><tr><td>\n  \u6280\u8853\u76f8\u8ac7\n  <\/td><td>\n  4,000\u5186\/1\u6642\u9593\n  <\/td><\/tr><\/tbody><\/table>\n\n\n\n<p>\u203b5\u5404\u7a2e\u5206\u6790\u88c5\u7f6e\u306b\u95a2\u3059\u308b\u901a\u5e38\u306e\u624b\u6cd5\u3067\u53ef\u80fd\u306a\u8a66\u6599\u524d\u51e6\u7406(\u8868\u9762\u7814\u78e8\u3001\u52a0\u5de5)\u306a\u3069\u306e\u4f5c\u696d<\/p>\n\n\n\n<p>\u203b6\u5404\u7a2e\u5206\u6790\u88c5\u7f6e\u306b\u95a2\u3059\u308b\u3088\u308a\u7cbe\u7dfb\u306a\u8a66\u6599\u524d\u51e6\u7406(\u8868\u9762\u7814\u78e8\u3001\u52a0\u5de5\u3001\u4e88\u5099\u89b3\u5bdf)\u304c\u5fc5\u8981\u306b\u306a\u308b\u4f5c\u696d<\/p>\n\n\n\n<p>\u5b66\u5185\u5229\u7528\u8005\u306b\u3064\u3044\u3066\u306fAFM\u3068LSCM\u306e\u88c5\u7f6e\u5229\u7528\u6599\u304c\u5909\u66f4\u3068\u306a\u308a\u307e\u3057\u305f\u3002<\/p>\n\n\n\n<p>\u5b66\u5916\u5229\u7528\u8005\u306b\u3064\u3044\u3066\u306f\u521d\u56de\u8b1b\u7fd2\u6599\u53ca\u3073\u6280\u8853\u4ee3\u884c\u6599\u306b\u3064\u3044\u3066\u3001\u6599\u91d1\u304c\u5909\u66f4\u3068\u306a\u3063\u305f\u4ed6\u3001\u4eca\u307e\u3067\u5b66\u5916\u958b\u653e\u3057\u3066\u3044\u306a\u304b\u3063\u305f\u672c\u65bd\u8a2d\u4fdd\u6709\u306eSEM\u3001CP\u3001AFM\u3001LSCM\u306e4\u6a5f\u7a2e\u306b\u3064\u3044\u3066\u3001\u5b66\u5916\u5229\u7528\u53ca\u3073\u5404\u88c5\u7f6e\u306b\u95a2\u3059\u308b\u6280\u8853\u652f\u63f4\u306e\u6599\u91d1\u898f\u7a0b\u3092\u8a2d\u5b9a\u3057\u307e\u3057\u305f\u3002<br><\/p>\n\n\n\n<p>\u672c\u6539\u5b9a\u306f\u4e3b\u306b\u672c\u5b66\u30ca\u30ce\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u4e8b\u696d\u306e\u6599\u91d1\u898f\u7a0b\u306e\u5909\u66f4\u306b\u4f34\u3046\u6539\u5b9a\u3068\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u88c5\u7f6e\u5229\u7528\u6599\u306e\u5909\u66f4\u306b\u4f34\u3044\u3001\u5229\u7528\u8005\u306e\u7686\u69d8\u306b\u3054\u8ca0\u62c5\u3092\u304a\u639b\u3051\u3057\u3066\u3057\u307e\u3046\u4e8b\u306b\u306a\u308a\u307e\u3059\u304c\u3001\u3054\u7406\u89e3\u306e\u307b\u3069\u4f55\u5352\u5b9c\u3057\u304f\u304a\u9858\u3044\u81f4\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u5229\u7528\u6599\u306b\u3064\u3044\u3066\u3054\u4e0d\u660e\u306a\u70b9\u304c\u3054\u3056\u3044\u307e\u3057\u305f\u3089\u3001\u65bd\u8a2d\u8077\u54e1\u307e\u3067\u3054\u9023\u7d61\u4e0b\u3055\u3044\u307e\u3059\u3088\u3046\u3088\u308d\u3057\u304f\u304a\u9858\u3044\u81f4\u3057\u307e\u3059\u3002<\/p>\n\t\t","protected":false},"excerpt":{"rendered":"<p>\u3044\u3064\u3082\u3054\u5229\u7528\u9802\u304d\u3042\u308a\u304c\u3068\u3046\u3054\u3056\u3044\u307e\u3059\u3002 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