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\t\t\t\t\u3044\u3064\u3082\u3054\u5229\u7528\u9802\u304d\u3042\u308a\u304c\u3068\u3046\u3054\u3056\u3044\u307e\u3059\u3002<\/p>\n

XPS\u306e\u30de\u30cb\u30e5\u30a2\u30eb\u304c\u66f4\u65b0\u306b\u306a\u308a\u307e\u3057\u305f\u3002\u88c5\u7f6e\u5229\u7528\u3059\u308b\u30e6\u30fc\u30b6\u30fc\u306e\u65b9\u306f\u78ba\u8a8d\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/p>\n

\u4e3b\u306a\u5909\u66f4\u70b9\u306b\u3064\u3044\u3066\u306f\u4ee5\u4e0b\u306e\u901a\u308a\u3067\u3059\u3002<\/p>\n

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Ch3\uff1a\u52a0\u901f\u96fb\u5727\uff11\uff4bV\u3001\uff12\uff15\uff4dA\u306e\u6761\u4ef6\u3067\u7d042.0nm\/minute(SiO2)<\/p>\n

Ch4:\u52a0\u901f\u96fb\u5727\uff13\uff4bV\u3001\uff12\uff15\uff4dA\u3001\u30b9\u30c6\u30fc\u30b8\u30c1\u30eb\u30c8-10\u5ea6\u306e\u72b6\u614b\u3067\u4f7f\u7528\u53ef\u80fd\u3002\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8\u306fCh1\u3068\u3000\u540c\u69d8\u3002\u4e3b\u306b\u30e2\u30ce\u30af\u30edX\u7dda\u3067\u306e\u6e2c\u5b9a\u306e\u969b\u306b\u4f7f\u7528\u51fa\u6765\u308b\u3002\u305f\u3060\u3057\u7167\u5c04\u6642\u306b\u5206\u5149\u7d50\u6676\u306e\u6249\u3092\u9589\u3081\u308b\u5fc5\u8981\u304c\u3042\u308b(monochrome\u2192baking)<\/p>\n

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