{"id":770,"date":"2014-06-13T18:21:36","date_gmt":"2014-06-13T09:21:36","guid":{"rendered":"https:\/\/labs.eng.hokudai.ac.jp\/labo\/HUXPSLab\/?p=770"},"modified":"2020-03-12T08:54:39","modified_gmt":"2020-03-11T23:54:39","slug":"20140613","status":"publish","type":"post","link":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/nocategoly\/20140613.html","title":{"rendered":"\u7814\u7a76\u5ba4\u79fb\u8ee2\u306b\u4f34\u3046\u88c5\u7f6e\u7b49\u306e\u5909\u66f4\u70b9\u306b\u3064\u3044\u3066"},"content":{"rendered":"
\u30a4\u30aa\u30f3\u30ac\u30f3\u306e\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8\u304c\u5909\u66f4\u306b\u306a\u308a\u307e\u3057\u305f\u3002<\/p>\n
ch1: 14.3nm\/min(SiO2)<\/p>\n
ch2: 10.0nm\/min(SiO2)<\/p>\n
ch3: 2.0nm\/min(SiO2)<\/p>\n
ch4: 14.3nm\/min(SiO2)\u3000Tilt-10\u5ea6\u50be\u659c\u6642<\/p>\n
<\/p>\n
\u88c5\u7f6e\u306e\u914d\u7f6e\u304c\u5909\u66f4\u306b\u306a\u308a\u307e\u3057\u305f\u3002<\/p>\n
<\/a><\/p>\n <\/p>\n <\/p>\n <\/p>\n <\/p>\n <\/p>\n <\/p>\n \u30a4\u30aa\u30f3\u30ac\u30f3\u306e\u30aa\u30fc\u30c8\u30d0\u30eb\u30d6\u30b3\u30f3\u30c8\u30ed\u30fc\u30e9\u30fc\u306e\u96fb\u6e90On\/Off\u30b9\u30a4\u30c3\u30c1\u304c\u7528\u610f\u3055\u308c\u307e\u3057\u305f\u3002<\/p>\n \u30aa\u30fc\u30c8\u30d0\u30eb\u30d6\u30b3\u30f3\u30c8\u30ed\u30fc\u30e9\u30fc\u306e\u96fb\u6e90\u306f\u3053\u306e\u30b9\u30a4\u30c3\u30c1\u3067On\/Off\u3092\u64cd\u4f5c\u3057\u3066\u4e0b\u3055\u3044\u3002\u30aa\u30fc\u30c8\u30d0\u30eb\u30d6\u30b3\u30f3\u30c8\u30ed\u30fc\u30e9\u30fc\u672c\u4f53\u306e\u96fb\u6e90\u306e\u64cd\u4f5c\u306f\u7981\u6b62\u3067\u3059\u3002<\/p>\n <\/p>\n <\/a><\/p>\n <\/p>\n <\/p>\n <\/p>\n <\/p>\n <\/p>\n <\/p>\n <\/p>\n \u307e\u305f\u4eca\u307e\u3067\u306f\u30a4\u30aa\u30f3\u30ac\u30f3\u306e\u30ac\u30b9\u5727\u3092\u78ba\u8a8d\u3059\u308b\u70ba\u3001AVC\u306e\u30dc\u30bf\u30f3\u3092On\u306b\u3059\u308b\u64cd\u4f5c\u304c\u3042\u308a\u307e\u3057\u305f\u304c\u3001\u3053\u308c\u304b\u3089\u306fAVC\u30dc\u30bf\u30f3\u306fOn\u72b6\u614b\u304c\u901a\u5e38\u72b6\u614b\u3068\u3057\u307e\u3059\u3002AVC\u30dc\u30bf\u30f3\u306e\u64cd\u4f5c\u306f\u884c\u308f\u306a\u3044\u3067\u4e0b\u3055\u3044\u3002<\/p>\n <\/p>\n <\/a><\/p>\n <\/p>\n <\/p>\n <\/p>\n <\/p>\n <\/p>\n <\/p>\n \u8a66\u6599\u6e96\u5099\u53f0\u304c\u90e8\u5c4b\u306e\u771f\u3093\u4e2d\u306b\u3042\u308a\u307e\u3059\u3002\u3053\u3053\u3067\u5404\u5206\u6790\u88c5\u7f6e\u306e\u8a66\u6599\u3092\u6e96\u5099\u3057\u3066\u4e0b\u3055\u3044\u3002<\/p>\n\u7814\u7a76\u5ba4\u8a2d\u5099\u306b\u3064\u3044\u3066<\/h4>\n