{"id":880,"date":"2014-10-01T15:49:27","date_gmt":"2014-10-01T06:49:27","guid":{"rendered":"https:\/\/labs.eng.hokudai.ac.jp\/labo\/HUXPSLab\/?p=880"},"modified":"2020-03-12T08:53:02","modified_gmt":"2020-03-11T23:53:02","slug":"20141001","status":"publish","type":"post","link":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/nocategoly\/20141001.html","title":{"rendered":"XPS\u306eA\uff52\u30a4\u30aa\u30f3\u30ac\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8\u5909\u66f4\u306e\u304a\u77e5\u3089\u305b"},"content":{"rendered":"

\t\t\t\tThank you for always using.<\/p>\n

Maintenance of the XPS, which was done from the beginning of this week has been completed today.<\/p>\n

Due to the maintenance, Ar+ etching rate in each channel of the XPS were slightly changed. Please check each value.<\/p>\n

ch1 3000eV: 14.2nm \/ min<\/p>\n

ch2 2000eV: 6.6nm \/ min<\/p>\n

ch3 1000eV: 3.8nm \/ min<\/p>\n

ch4 when using monochrome X-ray. 3000eV: 14.2nm \/ min<\/p>\n

We print updated value for Ar+ etching on XPS simple manual.<\/p>\n

XPS simple manual measurement part20141001(Sorry, now only Japanese ver.)<\/a>\u3044\u3064\u3082\u3054\u5229\u7528\u9802\u304d\u3042\u308a\u304c\u3068\u3046\u3054\u3056\u3044\u307e\u3059\u3002<\/p>\n

\u4eca\u9031\u521d\u3081\u304b\u3089\u884c\u308f\u308c\u3066\u3044\u305fXPS\u306e\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u4f5c\u696d\u306f\u672c\u65e5\u7d42\u4e86\u3057\u307e\u3057\u305f\u3002<\/p>\n

\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u306b\u4f34\u3044\u3001XPS\u306eAr\u30a4\u30aa\u30f3\u30ac\u30f3\u306e\u5404\u30c1\u30e3\u30f3\u30cd\u30eb\u3067\u306e\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8\u304c\u82e5\u5e72\u5909\u66f4\u3057\u3066\u304a\u308a\u307e\u3059\u3002\u3054\u78ba\u8a8d\u4e0b\u3055\u3044\u3002<\/p>\n

ch1 3000eV: 14.2nm\/min<\/p>\n

ch2 2000eV: 6.6nm\/min<\/p>\n

ch3 1000eV: 3.8nm\/min<\/p>\n

ch4 \u30e2\u30ce\u30af\u30edX\u7dda\u5229\u7528\u6642\u7528\u30003000eV: 14.2nm\/min<\/p>\n

\u65b0\u3057\u3044\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8\u306e\u5024\u306b\u3064\u3044\u3066\u306f\u7c21\u6613\u30de\u30cb\u30e5\u30a2\u30eb\u306e\u65b9\u306b\u3082\u66f4\u65b0\u7248\u3092\u8f09\u305b\u3066\u3042\u308a\u307e\u3059\u3002<\/p>\n

X\u7dda\u5149\u96fb\u5b50\u5206\u5149\u88c5\u7f6e(XPS)\u7c21\u6613\u30de\u30cb\u30e5\u30a2\u30eb\u6e2c\u5b9a\u7de820141001<\/a><\/p>\n

 \t\t<\/p>\n","protected":false},"excerpt":{"rendered":"

Thank you for always using. Maintenance of the XPS, which was done from the beginning of this week has been co… <\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[1],"tags":[],"_links":{"self":[{"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/posts\/880"}],"collection":[{"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/comments?post=880"}],"version-history":[{"count":1,"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/posts\/880\/revisions"}],"predecessor-version":[{"id":1923,"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/posts\/880\/revisions\/1923"}],"wp:attachment":[{"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/media?parent=880"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/categories?post=880"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/wp-json\/wp\/v2\/tags?post=880"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}