{"id":880,"date":"2014-10-01T15:49:27","date_gmt":"2014-10-01T06:49:27","guid":{"rendered":"https:\/\/labs.eng.hokudai.ac.jp\/labo\/HUXPSLab\/?p=880"},"modified":"2020-03-12T08:53:02","modified_gmt":"2020-03-11T23:53:02","slug":"20141001","status":"publish","type":"post","link":"https:\/\/c-mng.cwh.hokudai.ac.jp\/XPSLab.eng\/Root\/nocategoly\/20141001.html","title":{"rendered":"XPS\u306eA\uff52\u30a4\u30aa\u30f3\u30ac\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8\u5909\u66f4\u306e\u304a\u77e5\u3089\u305b"},"content":{"rendered":"
\t\t\t\tThank you for always using.<\/p>\n
Maintenance of the XPS, which was done from the beginning of this week has been completed today.<\/p>\n
Due to the maintenance, Ar+ etching rate in each channel of the XPS were slightly changed. Please check each value.<\/p>\n
ch1 3000eV: 14.2nm \/ min<\/p>\n
ch2 2000eV: 6.6nm \/ min<\/p>\n
ch3 1000eV: 3.8nm \/ min<\/p>\n
ch4 when using monochrome X-ray. 3000eV: 14.2nm \/ min<\/p>\n
We print updated value for Ar+ etching on XPS simple manual.<\/p>\n